The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 23, 2019

Filed:

Jul. 06, 2018
Applicant:

Globalwafers Co., Ltd., Hsinchu, TW;

Inventors:

Benno Orschel, St. Louis, MO (US);

Mike Wolfram, Dachwig, DE;

Assignee:

GlobalWafers Co., Ltd., Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H05H 1/46 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); G05B 19/406 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67288 (2013.01); G05B 19/406 (2013.01); G05B 2219/35283 (2013.01); G05B 2219/45031 (2013.01); G05B 2219/50193 (2013.01);
Abstract

A system for preventing an unsafe operation of a plurality of semiconductor wafer manufacturing machines communicatively coupled to a computing device. The system includes the computing device, which includes a processor coupled to a memory. The memory contains processor-executable instructions that, when executed, cause the computing device to perform the steps of storing, in the memory, a first state of a first machine of the plurality of machines, generating a first pending output to be issued to the first machine, determining whether an unsafe condition would result if the first pending output is issued to the first machine in the first state, issuing the first pending output upon determining that issuing the first pending output would not result in an unsafe condition, and blocking the first pending output from being issued upon determining that issuing the first pending output would result in an unsafe condition.


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