The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2019
Filed:
Apr. 07, 2016
Mitsubishi Gas Chemical Company, Inc., Tokyo, JP;
Kana Okada, Kanagawa, JP;
Takashi Makinoshima, Kanagawa, JP;
Masatoshi Echigo, Tokyo, JP;
Go Higashihara, Okayama, JP;
Atsushi Okoshi, Okayama, JP;
Mitsubishi Gas Chemical Company, Inc., Tokyo, JP;
Abstract
A material for forming an underlayer film for lithography, in which a compound represented by the following formula (0) is used. (in formula (0), each X independently represents an oxygen atom or a sulfur atom, or a non-crosslinked state, Rrepresents a 2n-valent group having 1 to 30 carbon atoms, or a single bond, each Rindependently represents a straight, branched or cyclic alkyl group having 1 to 30 carbon atoms, an aryl group having 6 to 30 carbon atoms, a straight, branched or cyclic alkenyl group having 2 to 30 carbon atoms, a thiol group, a halogen group, a nitro group, an amino group, a carboxylic acid group or a hydroxyl group, the alkyl group, the alkenyl group and the aryl group each optionally include a cyanato group, a thiol group, a halogen group, a nitro group, an amino group, a carboxylic acid group, a hydroxyl group, an ether bond, a ketone bond or an ester bond, each mis independently an integer of 0 to 4, in which at least one mis an integer of 1 to 4, each mis independently an integer of 0 to 3, n is an integer of 1 to 4, and each p is independently 0 or 1.)