The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2019
Filed:
Mar. 27, 2017
Applicant:
Carl Zeiss Microscopy, Llc, Thornwood, NY (US);
Inventors:
Weijie Huang, North Reading, MA (US);
John A. Notte, Gloucester, MA (US);
Assignee:
Carl Zeiss Microscopy, LLC, Thornwood, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 27/20 (2006.01); B03C 3/38 (2006.01); G21K 1/08 (2006.01); G21K 1/087 (2006.01); H01J 27/02 (2006.01);
U.S. Cl.
CPC ...
H01J 27/20 (2013.01); B03C 3/383 (2013.01); G21K 1/087 (2013.01); H01J 27/022 (2013.01);
Abstract
An ion source includes an external housing, an electrically conductive tip, a gas supply system, configured to supply an operating gas into the neighborhood of the tip, and a cooling system configured to cool the tip. The gas supply system includes a first tube with a hollow interior, and a chemical getter material is provided in the hollow interior of the tube.