The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2019
Filed:
Feb. 28, 2018
Kla-tencor Corporation, Milpitas, CA (US);
Avner Safrani, Misgav, IL;
Ron Rudoi, Haifa, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A notch detection system receives images of a sample from the imaging detector, in which the sample includes a notched surface and an un-notched surface bounded by a sidewall and further includes at least one notch known notch specifications. The images are generated such that illumination unobstructed by the sample is received by the detector and the sample prevents incident illumination from reaching the detector. The system further determines whether each image includes a notch, identifies the notched surface, and directs a sample positioner to position the sample with the notched surface in a selected direction when a notch is identified in at least one image of the one or more images.