The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

Sep. 22, 2017
Applicant:

Mks Instruments, Inc., Andover, MA (US);

Inventors:

Gerardo A. Brucker, Longmont, CO (US);

Timothy C. Swinney, Fort Collins, CO (US);

Brandon J. Kelly, Longmont, CO (US);

Alfred A. Funari, Fort Collins, CO (US);

Michael N. Schott, Loveland, CO (US);

Kristian S. Schartau, Erie, CO (US);

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 9/50 (2006.01); G01L 19/06 (2006.01); G01L 21/34 (2006.01); H01J 41/06 (2006.01);
U.S. Cl.
CPC ...
G01L 21/34 (2013.01); G01L 19/06 (2013.01); H01J 9/50 (2013.01); H01J 41/06 (2013.01); Y02W 30/828 (2015.05); Y10T 29/49007 (2015.01);
Abstract

A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.


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