The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2019

Filed:

Nov. 27, 2014
Applicant:

Shin-etsu Handotai Co., Ltd., Tokyo, JP;

Inventors:

Atsuo Uchiyama, Tomi, JP;

Hisakazu Takano, Nagano, JP;

Masahito Saitoh, Nagano, JP;

Hirotoshi Kouzu, Nagano, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B28D 5/04 (2006.01); B28D 5/00 (2006.01); B24B 27/06 (2006.01); H01L 21/304 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
B28D 5/0082 (2013.01); B24B 27/0633 (2013.01); B28D 5/045 (2013.01); H01L 21/304 (2013.01); H01L 22/12 (2013.01);
Abstract

Method for slicing a workpiece, including measuring a crystal axis orientation while holding a workpiece with a workpiece holder, setting the workpiece holder to a wire saw in such a manner that the measured crystal axis orientation is maintained, then adjusting a sliced plane orientation, pressing the workpiece against a wire row to slice the workpiece; the workpiece holder includes a portion slidable while holding the workpiece and a portion for fixing the slide portion, after measuring the crystal axis orientation, sliding the slide portion to move to the workpiece holder center in a manner that the measured crystal axis orientation is maintained, fixing the slide portion, setting the workpiece holder to the wire saw, then adjusting the sliced plane orientation, and slicing the workpiece. This enables an orientation measurement without limitation of distance between an orientation measuring instrument and plane to be measured can inhibit warpage deterioration and workpiece breakage.


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