The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2019
Filed:
Oct. 18, 2017
Akustica, Inc., Pittsburgh, PA (US);
Robert Bosch Gmbh, Stuttgart, DE;
Daniel C. Meisel, Pittsburgh, PA (US);
Bernhard Gehl, Wannweil, DE;
Yujie Zhang, Sunnyvale, CA (US);
Andrew Doller, Sharpsburg, PA (US);
Gokhan Hatipoglu, Pittsburgh, PA (US);
Akustica, Inc., Pittsburgh, PA (US);
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A Microelectromechanical system (MEMS) microphone comprises a base unit and a driving system disposed on the base unit. The driving system comprises a first diaphragm, a second diaphragm spaced apart from the first diaphragm, and a comb finger counter electrode assembly comprising a moving electrode member, the counter electrode assembly is mechanically coupled to the first and second diaphragms. The driving system further comprises a side wall mechanically coupled the first diaphragm to the second diaphragm defining a sealed electrode region and the sealed electrode region having an encapsulated gas pressure and the comb finger counter electrode assembly is disposed within the sealed electrode region.