The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 2019

Filed:

May. 15, 2018
Applicant:

Duet Microelectronics Llc, Raritan, NJ (US);

Inventors:

Ashok T. Ramu, Raritan, NJ (US);

Keun-Yong Ban, Raritan, NJ (US);

John Bayruns, Raritan, NJ (US);

Robert J. Bayruns, Raritan, NJ (US);

Assignee:

Duet Microelectronics, Inc., Raritan, NJ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/072 (2012.01); H01L 31/109 (2006.01); H01L 29/66 (2006.01); H01L 29/778 (2006.01); H01L 21/02 (2006.01); H01L 21/764 (2006.01); H01L 21/425 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66431 (2013.01); H01L 21/0257 (2013.01); H01L 21/425 (2013.01); H01L 21/764 (2013.01); H01L 29/7786 (2013.01);
Abstract

Fabrication of a dual enhancement-mode/depletion-mode (E-Mode/D-Mode) high electron mobility transistor (HEMT) called a threshold control terminal HEMT (TCT-HEMT) is performed which reduces capacitance between the TCT electrode and the source and drain electrodes of a TCT-HEMT, since such a capacitance may be parasitic, and which fabricates a TCT-HEMT capable of high-frequency operation. A method for fabricating a field-effect transistor (FET) includes: providing a substrate; disposing a back barrier on the substrate to form a base stack; forming a doped layer on the base stack; grow additional layers, including a threshold-control terminal (TCT) access layer; etch a pattern in at least one of the doped layer and the additional layers; and disposing a TCT contact on the TCT access layer.


Find Patent Forward Citations

Loading…