The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 2019

Filed:

Jun. 28, 2018
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Andreas Schmaunz, Oberkochen, DE;

Holger Doemer, Bopfingen, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/305 (2006.01); H01J 37/31 (2006.01); H01J 37/28 (2006.01); G01N 1/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/3053 (2013.01); H01J 37/3056 (2013.01); H01J 37/31 (2013.01); G01N 1/286 (2013.01); H01J 37/28 (2013.01); H01J 2237/063 (2013.01); H01J 2237/08 (2013.01); H01J 2237/28 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/31745 (2013.01); H01J 2237/31749 (2013.01);
Abstract

A method relates to the in situ preparation of a microscopic specimen is carried out using a particle beam device, which includes a particle beam column for producing a focused beam of charged particles, a specimen receptacle for receiving a specimen block, and a detector for detecting interaction products of the interaction between particle beam and specimen material. The method includes: providing a specimen block having an exposed structure that comprises a specimen region of interest; producing a bending edge in the exposed structure by the action of the particle beam such that at least some of the exposed structure is shaped in the direction of the incident particle beam; and moving the specimen receptacle, in which the specimen block is received, so that a specimen region, which is enclosed by the shaped structure, is observable and/or processable in the particle beam device.


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