The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2019
Filed:
Nov. 21, 2017
Applicants:
Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;
Semiconductor Manufacturing International (Beijing) Corporation, Beijing, CN;
Inventor:
Xuan Liu, Shanghai, CN;
Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/42 (2006.01); G03B 27/58 (2006.01); G03B 27/62 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70875 (2013.01);
Abstract
Mask cooling apparatus and mask cooling methods are provided. An exemplary mask cooling apparatus includes a cooler, having a cooling region, a coolant inlet region and a coolant outlet region; cooling channels, disposed in the cooling region of the cooler and used to contact with the mask; coolant inlet channels, disposed in the coolant inlet region and used to introduce a coolant in the cooling channels; and coolant outlet channels, disposed in the coolant outlet region and used to drain the coolant out from the cooling channels.