The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2019
Filed:
Nov. 15, 2017
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/00 (2006.01); G01M 11/02 (2006.01); G03F 7/20 (2006.01); G02B 7/02 (2006.01);
U.S. Cl.
CPC ...
G02B 7/003 (2013.01); G01M 11/0221 (2013.01); G01M 11/0292 (2013.01); G02B 7/023 (2013.01); G03F 7/7015 (2013.01); G03F 7/7085 (2013.01); G03F 7/70258 (2013.01);
Abstract
A method for producing a lens for a lithography apparatus is disclosed. A measurement system for ascertaining an optical characteristic of a partial lens for a lithography apparatus is also disclosed.