The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2019
Filed:
Jan. 19, 2018
Applicant:
Suss Microtec Lithography Gmbh, Garching bei Muenchen, DE;
Inventor:
Bernhard Bogner, Garching bei Muenchen, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/06 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); B32B 15/04 (2006.01); G03F 7/20 (2006.01); B25J 15/00 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0683 (2013.01); B25J 15/0014 (2013.01); B25J 15/0616 (2013.01); B32B 15/04 (2013.01); G03F 7/7075 (2013.01); H01L 21/6838 (2013.01); H01L 21/68707 (2013.01); Y10S 901/40 (2013.01);
Abstract
An end effector for holding substrates has a multi-layered main body and a fluid channel which is provided in the main body. The main body has a receiving end and a fastening end, and include at least two layers, wherein at least one of the layers is not inherently stable, and is formed from a synthetic material film.