The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2019

Filed:

Feb. 06, 2018
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventor:

Elliot John Smith, Dresden, DE;

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/51 (2006.01); H01L 21/308 (2006.01); H01L 21/306 (2006.01); H01L 29/786 (2006.01); H01L 29/417 (2006.01); H01L 29/66 (2006.01); H01L 29/06 (2006.01); H01L 21/84 (2006.01); H01L 27/12 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
H01L 29/51 (2013.01); H01L 21/3085 (2013.01); H01L 21/30604 (2013.01); H01L 21/84 (2013.01); H01L 27/1203 (2013.01); H01L 29/0649 (2013.01); H01L 29/41783 (2013.01); H01L 29/6656 (2013.01); H01L 29/66484 (2013.01); H01L 29/786 (2013.01); H01L 21/32139 (2013.01);
Abstract

A high-k dielectric metal gate (HKMG) transistor includes a substrate, an HKMG gate stack with a gate dielectric layer and a gate electrode layer positioned above the substrate. The gate electrode layer has an upper portion and a lower portion. A first liner contacts a sidewall portion of the upper portion. A spacer contacts the first liner and a sidewall portion of the lower portion. Raised source and drain regions are positioned adjacent the spacer. A height of the uppermost surface of the spacer is greater than a height of an uppermost surface of the raised source and drain regions. A width of the upper portion between the raised source and drain regions is smaller than a width of the lower portion between the raised source and drain regions.


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