The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2019

Filed:

Sep. 30, 2017
Applicant:

Renesas Electronics Corporation, Koutou-ku, Tokyo, JP;

Inventors:

Nobuo Tsuboi, Tokyo, JP;

Yoshiki Yamamoto, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 27/12 (2006.01); G05F 1/625 (2006.01); H01L 29/78 (2006.01); H03K 17/687 (2006.01); H01L 27/02 (2006.01); H01L 29/417 (2006.01); H01L 21/84 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1203 (2013.01); G05F 1/625 (2013.01); H01L 27/02 (2013.01); H01L 27/0207 (2013.01); H01L 27/1244 (2013.01); H01L 29/41733 (2013.01); H01L 29/78 (2013.01); H03K 17/687 (2013.01); H01L 21/8238 (2013.01); H01L 21/823871 (2013.01); H01L 21/84 (2013.01);
Abstract

Reliability of a semiconductor device is improved. A p-type MISFET of a thin film SOI type is formed in an SOI substrate including a semiconductor substrate, an insulating layer on the semiconductor substrate, and a semiconductor layer on the insulating layer, and n-type semiconductor regions which are source and drain region of the p-type MISFET are formed in the semiconductor layer and an epitaxial layer on the semiconductor layer. A semiconductor layer is formed via the insulating layer below the p-type MISFET formed in the n-type well region of the semiconductor substrate. In an n-type tap region which is a power supply region of the n-type well region, a silicide layer is formed on a main surface of the n-type well region without interposing the epitaxial layer therebetween.


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