The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2019
Filed:
Sep. 15, 2017
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Timothee Julien Vincent Blanquart, Tama, JP;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/027 (2006.01); H01L 21/04 (2006.01); H01L 21/18 (2006.01); H01L 21/033 (2006.01); H01L 29/66 (2006.01); C01B 21/06 (2006.01); C01C 3/14 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0228 (2013.01); H01L 21/0217 (2013.01); H01L 21/0234 (2013.01); H01L 21/0274 (2013.01); H01L 21/02126 (2013.01); H01L 21/02167 (2013.01); H01L 21/02175 (2013.01); H01L 21/02211 (2013.01); H01L 21/02219 (2013.01); H01L 21/02326 (2013.01); H01L 21/0337 (2013.01); H01L 21/042 (2013.01); H01L 21/18 (2013.01); H01L 29/66545 (2013.01); C01B 21/06 (2013.01); C01C 3/14 (2013.01);
Abstract
In an embodiment, a method for transferring a pattern constituted by vertical spacers arranged on a template with intervals to the template, includes depositing by plasma-enhanced cyclic deposition a layer as a spacer umbrella layer substantially only on a top surface of each vertical spacer made of silicon or metal oxide, wherein substantially no layer is deposited on sidewalls of the vertical spacers and on an exposed surface of the template, followed by transferring the pattern constituted by the vertical spacers to the template by anisotropic etching using the vertical spacers with the spacer umbrella layers.
Published as:
US2018151346A1; CN108122739A; KR20180060983A; TW201833993A; US10340135B2; KR102434504B1; TWI788311B; CN108122739B;