Scanning transmission electron microscope and method of image generation

Abstract

There is provided a scanning transmission electron microscope capable of producing plural types of STEM (scanning transmission electron microscopy) images using a single detector. The electron microscope () has an electron source () emitting an electron beam, a scanning deflector () for scanning the beam over a sample (S), an objective lens () for focusing the beam, an imager () placed at a back focal plane of the objective lens () or at a plane conjugate with the back focal plane, and a scanned image generator () for generating scanned images on the basis of images captured by the imager. The scanned image generator () operates to form electron diffraction patterns from the electron beam passing through positions on the sample by the scanning of the electron beam, to capture the electron diffraction patterns by the imager so that plural images are produced, to integrate the intensity of each pixel over an integration region that is set based on the size of an image of a transmitted wave in a respective one of the produced images for each of the produced images such that the signal intensity at each position on the sample is found, and to generate the scanned images on the basis of the signal intensities at the positions on the sample.