The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2019
Filed:
Jun. 18, 2018
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Peter Huber, Heidenheim, DE;
Assignee:
CARL ZEISS SMT GMBH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 1/24 (2012.01); G21K 1/06 (2006.01); G03F 1/84 (2012.01);
U.S. Cl.
CPC ...
G03F 7/7015 (2013.01); G03F 1/24 (2013.01); G03F 1/84 (2013.01); G03F 7/70316 (2013.01); G03F 7/70891 (2013.01); G03F 7/70958 (2013.01); G21K 1/062 (2013.01); G21K 2201/065 (2013.01);
Abstract
A reflective optical element, in particular for a microlithographic projection exposure apparatus or a mask inspection apparatus. According to one aspect, the reflective optical element has an optically effective surface, a substrate (), a reflection layer system () and at least one porous outgassing layer (), which at least intermittently releases particles adsorbed in the outgassing layer () when the optically effective surface () is irradiated by electromagnetic radiation.