Clock signal generators and substrate inspecting apparatuses having the same

Abstract

A clock signal generator includes an optic mirror rotatable to scan an incident light beam in a first direction, a grid plate including a plurality of grid arrays arranged in a second direction different from the first direction, wherein light reflected from the optic mirror is selectively passed through when the light beam is scanned on the grid plate in the first direction, the grid array being offset in the first direction by a particular distance with respect to an adjacent grid array, a light detector configured to detect a light passing through the grid arrays, and a pixel clock generator configured to generate a clock signal based on detection signals received from the light detector.