The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2019
Filed:
Oct. 31, 2017
Applicant:
Oxford Instruments Asylum Research, Inc., Goleta, CA (US);
Inventors:
Aleksander Labuda, Goleta, CA (US);
Deron Walters, Santa Barbara, CA (US);
Jason Cleveland, Santa Barbara, CA (US);
Roger Proksch, Santa Barbara, CA (US);
Assignee:
Oxford Instruments Asylum Research Inc, Goleta, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01Q 20/02 (2010.01);
U.S. Cl.
CPC ...
G01Q 20/02 (2013.01);
Abstract
This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.