The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2019

Filed:

Dec. 13, 2016
Applicants:

Oxford Instruments Plc, Oxfordshire, GB;

Oxford Instruments Afm Inc, Pleasanton, CA (US);

Inventors:

Roger Carlos Proksch, Santa Barbara, CA (US);

Dan Bocek, Santa Barbara, CA (US);

Jason Cleveland, Ventura, CA (US);

Matthew Longmire, Santa Barbara, CA (US);

Matthew Klonowski, Santa Barbara, CA (US);

Assignee:

Oxford Instruments AFM Inc, Pleasanton, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/14 (2006.01); G01D 5/22 (2006.01); G01Q 10/04 (2010.01); H01F 21/04 (2006.01);
U.S. Cl.
CPC ...
G01D 5/2291 (2013.01); G01B 7/14 (2013.01); G01Q 10/04 (2013.01); H01F 21/04 (2013.01);
Abstract

A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.


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