Charged particle system and method for measuring deflection fields in a sample

Abstract

There is provided a charged particle system () that has: illumination optics () for illuminating a sample with charged particles; an imaging deflector system () disposed behind an objective lens (); a detector () having a detection surface (), imaging optics () disposed behind the imaging deflector system () and operative to focus the charged particles as diffraction discs () onto the detection surface (); a storage unit () for storing intensity information detected by the detector (); and a controller () for controlling the imaging deflector system (). The controller () controls the imaging deflector system () to cause the charged particles passing through a given position of particle impingement on the sample to be deflected under successively different sets of deflection conditions and to bring the diffraction discs () into focus onto successively different regions of the detection surface ().