The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2019

Filed:

Jun. 18, 2015
Applicant:

Jeol Ltd., Tokyo, JP;

Inventor:

Shigeyuki Morishita, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01J 2237/1534 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/2809 (2013.01);
Abstract

A device which computes an angular range of illumination of an electron beam in which aberrations in an optical system can be measured efficiently by a tableau method. The device () includes an aberration coefficient information acquisition portion () for obtaining information about aberration coefficients of the optical system, a phase distribution computing portion () for finding a distribution of phases in the electron beam passed through the optical system on the basis of the information about the aberration coefficients, and an angular range computing portion () for finding the angular range of illumination on the basis of the distribution of phases found by the phase distribution computing portion ().


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