The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2019

Filed:

Jan. 10, 2017
Applicant:

Jsr Corporation, Tokyo, JP;

Inventor:

Hayato Namai, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/09 (2006.01); G03F 7/11 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); G03F 7/38 (2006.01); G03F 7/004 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); C08F 216/16 (2006.01); C08F 220/28 (2006.01); C08F 220/68 (2006.01); C09D 129/10 (2006.01); C09D 133/10 (2006.01); C09D 133/14 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); C08F 216/165 (2013.01); C08F 220/28 (2013.01); C08F 220/68 (2013.01); C09D 129/10 (2013.01); C09D 133/10 (2013.01); C09D 133/14 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/038 (2013.01); G03F 7/091 (2013.01); G03F 7/11 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/20 (2013.01); G03F 7/2004 (2013.01); G03F 7/2037 (2013.01); G03F 7/2041 (2013.01); G03F 7/32 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01); C08F 2220/281 (2013.01); C08F 2220/282 (2013.01); C08F 2220/283 (2013.01);
Abstract

A resin composition comprises a polymer comprising a structural unit that comprises a group represented by formula (1), and a solvent. In the formula (1), Rto Reach independently represent a hydrogen atom, a fluorine atom or a monovalent organic group having 1 to 20 carbon atoms, wherein at least one of Rto Rhas the fluorine atom or a group including the fluorine atom. Rrepresents a substituted or unsubstituted trivalent chain hydrocarbon group having 1 to 7 carbon atoms. * denotes a binding site to other moiety of the structural unit. The structural unit is preferably represented by any one of formulae (2-1) to (2-3). In the formulae (2-1) to (2-3), Z represents a group represented by formula (1).


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