The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2019
Filed:
May. 30, 2018
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Kangguo Cheng, Schenectady, NY (US);
James J. Demarest, Rensselaer, NY (US);
Juntao Li, Cohoes, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/52 (2006.01); H01L 21/76 (2006.01); H01L 29/78 (2006.01); H01L 23/525 (2006.01); H01L 29/66 (2006.01); H01L 29/45 (2006.01); H01L 21/768 (2006.01); H01L 21/3205 (2006.01); H01L 21/8234 (2006.01); H01L 21/308 (2006.01); H01L 27/04 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5256 (2013.01); H01L 21/3086 (2013.01); H01L 21/32053 (2013.01); H01L 21/76889 (2013.01); H01L 21/823431 (2013.01); H01L 27/04 (2013.01); H01L 29/456 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01);
Abstract
A vertical fuse element, including, a conductive silicide base on a surface of a substrate, and a conductive silicide pillar extending in a direction perpendicular to the surface of the substrate, where the conductive silicide pillar is on the conductive silicide base, and wherein the conductive silicide pillar includes an upper portion having a width, W, a base having a width, W, and a neck region having a width, W, where W<W, and W≤W.