The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2019
Filed:
Jan. 14, 2015
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Mitsunori Sugiyama, Tokyo, JP;
Masafumi Inoue, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 23/02 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
G05B 19/41875 (2013.01); G05B 23/0235 (2013.01); G05B 2219/31443 (2013.01); G05B 2219/45031 (2013.01);
Abstract
The present invention improves the accuracy of detecting abnormality in a substrate processing apparatus. A failure detection apparatusis provided with a data acquisition partused to collect data detected by sensors-to--to-and-to-disposed in a CMP apparatus. In addition, the failure detection apparatusis provided with a determination partused to read recipe data from a recipe storage part, to compare the recipe data thus read with the data collected by a data acquisition part, thereby determining that abnormality is present in the CMP apparatus if the two data items differ.