The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2019
Filed:
Nov. 13, 2015
Air Products and Chemicals, Inc., Allentown, PA (US);
Timothy Edward Conway, Allentown, PA (US);
Vladimir Yliy Gershtein, Allentown, PA (US);
Jeffrey Alan Hopkins, Whitehall, PA (US);
Brian M. Lindenmuth, Whitehall, PA (US);
Thomas M. Booth, Kempton, PA (US);
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Abstract
An onsite purification plant/system to delivery high and ultra high purity product, such as, process chemicals, industrial and specialty gases to manufacturing processes within the onsite plant turndown ratio from 0% to 100% while preserving the predetermined purity of the supplied substances within a predefined specification range is provided. Preserving liquid/vapor ratio in at least one of the purification means/units ensuring that product purity range stays unchanged is achieved by redirecting the product back into the onsite purification plant/system.