The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2019
Filed:
Sep. 06, 2017
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Nuflare Technology, Inc., Yokohama-shi, JP;
Shinya Higashi, Yokohama, JP;
Kaori Deura, Yokohama, JP;
Kunihiko Suzuki, Sunto, JP;
Masayoshi Yajima, Ashigarakami, JP;
Kabushiki Kaisha Toshiba, Minato-ku, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
According to one embodiment, a film forming apparatus includes a process chamber, a placement portion, a susceptor, a cover, a gas source, a heater, and a support portion. The placement portion is provided inside the process chamber. The susceptor is held in an end portion of the placement portion and is capable of placing a substrate. The cover is capable of being placed facing the susceptor inside the process chamber. The gas source is capable of supplying a process gas between the cover and the substrate. The heater is capable of heating the substrate. The support portion is provided inside the process chamber and is capable of supporting the cover at a first position above the susceptor and is capable of separating the cover at a second position which is different from the first position.