The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2019
Filed:
Nov. 19, 2015
Silcotek Corp., Bellefonte, PA (US);
Aixtron SE, Herzogenrath, DE;
David A. Smith, Bellefonte, PA (US);
Min Yuan, State College, PA (US);
James B. Mattzela, Port Matilda, PA (US);
Olaf Martin Wurzinger, Ubach-Palenberg, DE;
Dietmar Keiper, Aachen, DE;
Anna Katharina Haab, Wurselen, DE;
SilcoTek Corp., Bellefonte, PA (US);
AIXTRON SE, Herzogenrath, DE;
Abstract
A delivery device, manufacturing system, and process of manufacturing are disclosed. The delivery device includes a feed tube and a chemical vapor deposition coating applied over an inner surface of the feed tube, the chemical vapor deposition coating being formed from decomposition of dimethylsilane. The manufacturing system includes the delivery device and a chamber in selective fluid communication with the delivery device. The process of manufacturing uses the manufacturing system to produce an article.