The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2019
Filed:
Jul. 09, 2015
Asml Holding N.v., Veldhoven, NL;
Matthew Lipson, Stamford, CT (US);
Vincent Dimilia, Pleasantville, NY (US);
Ronald Peter Totillo, Brookfield, CT (US);
Tammo Uitterdijk, Wilton, CT (US);
Steven Michael Zimmerman, Beacon, NY (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
An electrostatic clamp () and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer () having a first ultra-low expansion (ULE) material, a second layer () coupled to the first layer, having a second ULE material, and a third layer (), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels () located between the first layer and the second layer and a composite layer () interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.