The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2019

Filed:

Jan. 31, 2014
Applicants:

L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;

Satoko Gatineau, Seoul, KR;

Changhee Ko, Tsukuba, JP;

Jean-marc Girard, Versaillles, FR;

Julien Gatineau, Seoul, KR;

Inventors:

Satoko Gatineau, Seoul, KR;

Changhee Ko, Tsukuba, JP;

Jean-Marc Girard, Versaillles, FR;

Julien Gatineau, Seoul, KR;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/06 (2006.01); C07F 15/06 (2006.01); C23C 16/18 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); C23C 16/42 (2006.01); C23C 16/455 (2006.01); C23C 16/28 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
C23C 16/06 (2013.01); C07F 15/06 (2013.01); C23C 16/18 (2013.01); C23C 16/28 (2013.01); C23C 16/34 (2013.01); C23C 16/40 (2013.01); C23C 16/406 (2013.01); C23C 16/42 (2013.01); C23C 16/45525 (2013.01); C23C 16/45553 (2013.01); H01L 21/28518 (2013.01); H01L 21/28556 (2013.01); H01L 21/76841 (2013.01);
Abstract

Cobalt-containing compounds, their synthesis, and their use for the deposition of cobalt containing films are disclosed. The disclosed cobalt-containing compounds have one of the following formulae: wherein each of R, R, R, Rand Ris independently selected from the group consisting of hydrogen and linear, cyclic, or branched hydrocarbon groups; provided that (a) R≠Rand/or Rwhen Rand Rand Rare a hydrocarbon group; (b) Rand Rare a hydrocarbon group when Ris H; or (c) Ris a C2-C4 hydrocarbon group when Rand Rare H.


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