The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2019
Filed:
Aug. 28, 2015
Senju Metal Industry Co., Ltd., Tokyo, JP;
Tomotake Kagaya, Chiba, JP;
Senju Metal Industry Co., Ltd., Tokyo, JP;
Abstract
The invention enables quick evacuation of a chamber to a specified target degree of vacuum while increasing selectivity of evacuation conditions. A vacuum-processing device contains a chamberthat enables a workpiece to be soldered in a vacuum environment, an operating partthat sets a condition for evacuating the chamber, a pumpthat evacuates the chamber, and a control portionthat calculates the amount of decrease in the degree of vacuum when evacuating the chamberusing a predetermined pump output, sets the calculated value as a reference value and switches an evacuation property from the evacuation property including a lower pump output to the evacuation property including a higher pump output when the calculated amount of decrease in degree of vacuum in real time has become smaller than the reference value.