The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2019

Filed:

Jun. 18, 2014
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventors:

Eric A. Kirkland, Colorado Springs, CO (US);

Barry Gregerson, Deephaven, MN (US);

Eric S. Olson, Shorewood, MN (US);

Christian Andersen, Carver, MN (US);

Jason Todd Steffens, Shakopee, MN (US);

Ryan Mushel, Chaska, MN (US);

Karen Anderson, Lonsdale, MN (US);

Assignee:

Entegris, Inc., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67379 (2013.01); H01L 21/67369 (2013.01); H01L 21/67376 (2013.01); H01L 21/67383 (2013.01); H01L 21/67386 (2013.01);
Abstract

Apparatuses and methods providing a ballast system for adjusting the center of gravity of a standardized front opening wafer container. Various embodiments of the disclosure present ballast systems that are low profile, do not require modifications to the shell of the wafer container, and can be retrofit to existing wafer carriers. In some embodiments, these capabilities are accomplished by a ballast that mounts to a kinematic coupling plate of the wafer container. In one embodiment, the ballasting can also provide sufficient counter force to the lifting forces associated with purging of the wafer container, thereby preventing 'lift off' of the wafer container during purging operations. The ballasts can be removed for shipping of the wafer container, thereby decreasing shipping costs.


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