The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2019
Filed:
May. 30, 2017
Applicant:
Jsr Corporation, Minato-ku, JP;
Inventors:
Takahiro Hayama, Minato-ku, JP;
Yasutaka Kamei, Minato-ku, JP;
Naoki Nishiguchi, Minato-ku, JP;
Satoshi Kamo, Minato-ku, JP;
Tomotaka Shinoda, Minato-ku, JP;
Assignee:
JSR Corporation, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/321 (2006.01); H01L 21/306 (2006.01); B24B 37/04 (2012.01); B24B 49/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3212 (2013.01); H01L 21/30625 (2013.01); B24B 37/042 (2013.01); B24B 49/16 (2013.01); H01L 21/30604 (2013.01);
Abstract
A semiconductor treatment composition includes potassium, sodium, and a compound A represented by the formula (1), and has a potassium content M(ppm) and a sodium content M(ppm) that satisfy M/M=1×10to 1×10.