The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2019
Filed:
Jan. 21, 2018
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
David J. Coumou, Webster, NY (US);
Dennis M. Brown, Pittsford, NY (US);
Eldridge M. Mount, IV, Macedon, NY (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H03F 1/30 (2006.01); H03L 7/085 (2006.01); H03F 3/19 (2006.01); H03F 3/21 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3299 (2013.01); H01J 37/32174 (2013.01); H01J 37/32183 (2013.01); H03F 1/30 (2013.01); H01J 37/3211 (2013.01); H01J 37/32091 (2013.01); H03F 3/19 (2013.01); H03F 3/21 (2013.01); H03F 2200/451 (2013.01); H03L 7/085 (2013.01);
Abstract
An RF generator in a dual frequency RF generation system. The RF generator detects IMD components resulting from interaction of the two frequencies. The IMD is reduced by adjusting the phase of the RF signal output by the RF generator. In various configurations, the IMD may also be reduced by applying a power adjustment value.