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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10304656 B1

PDFFull Text
Date of Patent:
May. 28, 2019

Filed:

Nov. 26, 2014

Ion beam device

Applicant:

Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;

Inventors:

Hiroyuki Muto, Tokyo, JP;

Yoshimi Kawanami, Tokyo, JP;

Assignee:

HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;

Attorney:

Miles & Stockbridge P.C.

Primary Examiner:

Nicole M Ippolito

Assistant Examiner:

Sean M Luck

Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/08 (2006.01); H01J 37/147 (2006.01); H01J 27/26 (2006.01); F25D 19/00 (2006.01); H01J 27/02 (2006.01); H01J 37/285 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); F25D 19/006 (2013.01); H01J 27/022 (2013.01); H01J 27/26 (2013.01); H01J 37/08 (2013.01); H01J 37/1474 (2013.01); H01J 37/285 (2013.01); F25B 2500/13 (2013.01); H01J 2237/002 (2013.01); H01J 2237/0216 (2013.01); H01J 2237/0807 (2013.01);
Abstract

In this invention, vibrations generated by a freezer from a cooling mechanism for cooling an ion source emitter tip are prevented from being transmitted to the emitter tip as much as possible, while the cooling capability of the cooling mechanism is improved widely. The ion beam device () is equipped with: an ion source housing () provided with an emitter tip () and defining an ion source chamber () supplied with an ionization gas or gas molecules; a gas pot () provided in the ion source chamber () so as to be thermally connected to the emitter tip () and accommodated so as to have no direct physical contact with a cooling stage () of a freezer (); and a spacer () provided on the peripheral surface of the cooling stage () housed by the gas pot () and maintaining a given interval or greater between the peripheral surface of the cooling stage () and the internal peripheral surface of the gas pot ().

Find Patent Forward Citations

Muto, Hiroyuki. (2019). Ion beam device (U.S. Patent No. 10304656). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10304656

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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