The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2019
Filed:
Jul. 29, 2015
Applicant:
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Inventors:
Kengo Asai, Tokyo, JP;
Hiroyasu Shichi, Tokyo, JP;
Hisayuki Takasu, Tokyo, JP;
Toru Iwaya, Tokyo, JP;
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01); H01J 37/30 (2006.01); H01J 37/305 (2006.01); H01J 27/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/08 (2013.01); H01J 27/04 (2013.01); H01J 37/30 (2013.01); H01J 37/305 (2013.01); H01J 2237/081 (2013.01); H01J 2237/082 (2013.01); H01J 2237/303 (2013.01);
Abstract
To provide an ion gun of a penning discharge type capable of achieving a milling rate which is remarkably higher than that in the related art, an ion milling device including the same, and an ion milling method. An ion generation unit includes a cathode that emits electrons, an anode that is provided within the ion generation unit and has an inner diameter of 5.2 mm or less, and magnetic-field generation means using a permanent magnet of which a maximum energy product ranges from 110 kJ/mto 191 kJ/m.