The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2019

Filed:

Apr. 27, 2016
Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Nanchang Zhu, Shanghai, CN;

Zhubin Shi, Shanghai, CN;

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/20 (2006.01); G01R 31/02 (2006.01); G01R 1/073 (2006.01); G01R 27/14 (2006.01); G01R 31/26 (2014.01); G01R 19/00 (2006.01); G01R 33/09 (2006.01);
U.S. Cl.
CPC ...
G01R 1/073 (2013.01); G01R 27/14 (2013.01); G01R 31/2601 (2013.01); G01R 19/0084 (2013.01); G01R 31/2648 (2013.01); G01R 33/098 (2013.01);
Abstract

Multiple pin probes and methods for controlling such multiple pin probes to support parallel measurements are disclosed. The method may include: establishing electrical contact between a multiple pin probe and a subject of measurement; selecting two pins out of a plurality of pins included in the multiple pin probe as current-carrying pins; selecting more than two additional pins out of the plurality of pins included in the multiple pin probe as voltage-metering pins; injecting a current through the current-carrying pins; simultaneously measuring voltage signals through the voltage-metering pins; calculating a simulated voltage distribution curve at least partially based on the voltage signals simultaneously measured through the voltage-metering pins; and determining one or more processor monitor parameters of the subject of measurement at least partially based on the simulated voltage distribution curve.


Find Patent Forward Citations

Zhu, Nanchang. (2019). Multiple pin probes with support for performing parallel measurements (U.S. Patent No. 10302677). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10302677

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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