The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2019

Filed:

Jun. 21, 2017
Applicant:

Rigaku Corporation, Tokyo, JP;

Inventors:

Kazuhiko Omote, Akishima, JP;

Takashi Yamada, Takatsuki, JP;

Assignee:

Rigaku Corporation, Akishima-shi, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/22 (2018.01); G01N 23/223 (2006.01); G21K 1/02 (2006.01); G21K 1/06 (2006.01); G21K 1/04 (2006.01); G01N 15/02 (2006.01); G01N 23/2055 (2018.01); G01N 23/207 (2018.01);
U.S. Cl.
CPC ...
G01N 23/223 (2013.01); G01N 15/0211 (2013.01); G01N 23/2055 (2013.01); G01N 23/2076 (2013.01); G01N 23/22 (2013.01); G21K 1/02 (2013.01); G21K 1/04 (2013.01); G21K 1/06 (2013.01); G21K 1/062 (2013.01);
Abstract

A grazing incidence X-ray fluorescence spectrometer () of the present invention includes: a bent spectroscopic device () to monochromate X-rays () from an X-ray source () and generate an X-ray beam () focused on a fixed position () on a surface of a sample (S); a slit member () disposed between the bent spectroscopic device () and the sample (S) and having a linear opening (); a slit member moving unit () to move the slit member () in a direction that intersects the X-ray beam () passing through the linear opening (); a glancing angle setting unit () to move the slit member () by using the slit member moving unit (), and set a glancing angle (α) of the X-ray beam () to a desired angle; and a detector () to measure an intensity of fluorescent X-rays () from the sample (S) irradiated with the X-ray beam ().


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