The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Aug. 07, 2017
Globalfoundries Inc., Grand Cayman, KY;
Hui Zang, Guilderland, NY (US);
Keith Tabakman, Gansevoort, NY (US);
Ruilong Xie, Niskayuna, NY (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
Various novel methods of forming a gate-to-source/drain conductive contact structure and the resulting novel device structures are disclosed. One illustrative method disclosed herein includes performing at least one first etching process to form a recess in a gate structure of a gate of a transistor device so as to expose an innermost surface of a portion of a sidewall spacer positioned adjacent a first sidewall of the gate structure and performing at least one second etching process through at least the recess in the gate structure so as to remove at least a portion of the portion of the sidewall spacer with the exposed innermost surface.