The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 21, 2019

Filed:

Dec. 19, 2017
Applicant:

Phoenix Llc, Monona, WI (US);

Inventors:

Joseph D. Sherman, Santa Fe, NM (US);

Evan R. Sengbusch, Verona, WI (US);

Ross F. Radel, Madison, WI (US);

Arne V. Kobernik, Madison, WI (US);

Tye T. Gribb, Fitchburg, WI (US);

Preston J. Barrows, Madison, WI (US);

Christopher M. Seyfert, Ridgeway, WI (US);

Logan D. Campbell, Madison, WI (US);

Daniel J. Swanson, Madison, WI (US);

Eric D. Risley, Middleton, WI (US);

Jin W. Lee, Madison, WI (US);

Kevin D. Meaney, Green Bay, WI (US);

Assignee:

PHOENIX LLC, Monona, WI (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 27/02 (2006.01); H01J 37/08 (2006.01); H01J 27/18 (2006.01); H01J 27/16 (2006.01); H01J 27/22 (2006.01);
U.S. Cl.
CPC ...
H01J 27/028 (2013.01); H01J 27/024 (2013.01); H01J 27/16 (2013.01); H01J 27/18 (2013.01); H01J 27/22 (2013.01); H01J 37/08 (2013.01);
Abstract

A negative ion source includes a plasma chamber, a microwave source, a negative ion converter, a magnetic filter and a beam formation mechanism. The plasma chamber contains gas to be ionized. The microwave source transmits microwaves to the plasma chamber to ionize the gas into atomic species including hyperthermal neutral atoms. The negative ion converter converts the hyperthermal neutral atoms to negative ions. The magnetic filter reduces a temperature of an electron density provided between the plasma chamber and the negative ion converter. The beam formation mechanism extract the negative ions.


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