The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Mar. 09, 2016
Applicant:
Suss Microtec Lithography Gmbh, Garching, DE;
Inventors:
Dieter Albert, Karlsruhe, DE;
Michael Braun, Wurmberg-Neubaerental, DE;
Assignee:
SUSS MICROTEC LITHOGRAPHY GMBH, Garching, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/687 (2006.01); F16J 15/3252 (2016.01); F16J 15/3268 (2016.01); F16J 15/3228 (2016.01); F16J 15/3276 (2016.01);
U.S. Cl.
CPC ...
F16J 15/3252 (2013.01); F16J 15/3228 (2013.01); F16J 15/3268 (2013.01); F16J 15/3276 (2013.01); H01L 21/67126 (2013.01); H01L 21/68735 (2013.01);
Abstract
A sealing ring for attaching to a cover ring of a wafer treating device has an annular carrier and a sealing lip which is releasably attached to the carrier.