The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Oct. 15, 2015
Applicant:
Veeco Precision Surface Processing Llc, Horsham, PA (US);
Inventors:
John Taddei, Jim Thorpe, PA (US);
Jonathan Yutkowitz, Horsham, PA (US);
Assignee:
VEECO PRECISION SURFACE PROCESSING LLC, Horsham, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C02F 1/68 (2006.01);
U.S. Cl.
CPC ...
C02F 1/68 (2013.01); C02F 2209/005 (2013.01); C02F 2209/03 (2013.01); C02F 2209/05 (2013.01);
Abstract
An apparatus and method to convert high resistivity (18 MOhm/cm) deionized water into lower resistivity deionized water with a tight resistivity range. The apparatus is diminished in size to require less space, has an improved sensitivity resistivity probe to permit a lower operating range, an increased communication rate with updated control logic to permit holding tighter tolerances. The method is environmentally friendly in that it replaces the use of harsh chemistries and eliminates the generation of hazardous waste.