The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Jun. 18, 2015
Toshiba Mitsubishi-electric Industrial Systems Corporation, Chuo-ku, JP;
Kochi Prefectural Public University Corporation, Kochi-shi, JP;
Kyoto University, Kyoto-shi, JP;
Takahiro Hiramatsu, Tokyo, JP;
Hiroyuki Orita, Tokyo, JP;
Toshiyuki Kawaharamura, Kochi, JP;
Shizuo Fujita, Kyoto, JP;
Takayuki Uchida, Kyoto, JP;
Toshiba Mitsubishi-Electric Industrial Systems Corporation, Chuo-ku, JP;
Kochi Prefectural Public University Corporation, Kochi-shi, JP;
Kyoto University, Kyoto-shi, JP;
Abstract
Disclosed herein in a method of forming a metal oxide film, which can provide a high-quality metal oxide film while enhancing production efficiency. The method includes the steps of: turning a raw-material solution having a metallic element into a mist, to obtain a raw-material solution mist; turning a reaction aiding solution into a mist, to obtain an aiding-agent mist; feeding the raw-material solution mist and the aiding-agent mist into a mixing vessel, thereby mixing the raw-material solution mist and the aiding-agent mist, to obtain a mixed mist; and feeding the mixed mist onto a back surface of a substrate which is heated, to obtain a metal oxide film.