Array of hole-type surround gate vertical field effect transistors and method of making thereof

Abstract

Doped semiconductor strips, a planar insulating spacer layer, a gate conductor material layer, and a dielectric cap layer are formed over a substrate. A two-dimensional array of openings is formed through the dielectric cap layer and the gate electrode material layer. Gate dielectrics are formed in the two-dimensional array of openings, and vertical semiconductor channels are formed on each of the gate dielectrics. Gate divider rail structures are formed through the gate conductor material layer. The gate divider rail structures divide the gate conductor material layer into a one-dimensional array of gate electrode lines. Each of the gate electrode lines includes a one-dimensional array of openings arranged along a horizontal direction to form a two-dimensional array of hole-type surrounding gate vertical field effect transistors.