The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Dec. 04, 2015
Applicants:
Alex Phillip Graham Robinson, Birmingham, GB;
Andeas Frommhold, Dera, DE;
Alan Brown, Worcestershire, GB;
Tom Lada, Somerville, MA (US);
Inventors:
Alex Phillip Graham Robinson, Birmingham, GB;
Andeas Frommhold, Dera, DE;
Alan Brown, Worcestershire, GB;
Tom Lada, Somerville, MA (US);
Assignee:
Irresistible Materials LTD, Birmingham, GB;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/027 (2006.01); H01L 21/02 (2006.01); H01L 21/3065 (2006.01); H01L 21/308 (2006.01); H01L 21/311 (2006.01); B05D 1/00 (2006.01); B05D 3/00 (2006.01); B05D 3/02 (2006.01); C09D 163/04 (2006.01); C09D 177/00 (2006.01); C01B 32/152 (2017.01);
U.S. Cl.
CPC ...
H01L 21/0274 (2013.01); B05D 1/005 (2013.01); B05D 3/002 (2013.01); B05D 3/0254 (2013.01); C01B 32/152 (2017.08); C09D 163/04 (2013.01); C09D 177/00 (2013.01); H01L 21/02115 (2013.01); H01L 21/02282 (2013.01); H01L 21/02318 (2013.01); H01L 21/3065 (2013.01); H01L 21/3081 (2013.01); H01L 21/31122 (2013.01); H01L 21/31138 (2013.01);
Abstract
Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative and a crosslinking agent. Further disclosed is a process for forming a hard-mask.