The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 14, 2019

Filed:

Nov. 20, 2015
Applicant:

Hitachi Kokusai Electric Inc., Tokyo, JP;

Inventors:

Toshiro Koshimaki, Toyama, JP;

Kazuhide Asai, Toyama, JP;

Hideto Shimizu, Toyama, JP;

Kayoko Yashiki, Toyama, JP;

Kazuyoshi Yamamoto, Toyama, JP;

Nobuhisa Makino, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G05B 19/00 (2006.01); G05B 19/042 (2006.01); H01L 21/66 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
G06F 17/5045 (2013.01); G05B 19/042 (2013.01); G05B 19/00 (2013.01); G05B 19/418 (2013.01); G05B 19/41865 (2013.01); G05B 19/41875 (2013.01); G05B 2219/00 (2013.01); G05B 2219/23295 (2013.01); G05B 2219/45031 (2013.01); H01L 22/20 (2013.01); Y02P 90/265 (2015.11);
Abstract

A management apparatus includes: a manipulation & display unit including a user interface for selecting a reference device information, and configured to display: a difference between the device information obtained from the substrate processing device and the reference device information selected via the user interface; a content of the reference device information; and a content of the device information, and further configured to receive a command for modifying the device information; and a control unit configured to modify the device information based on the command received from the manipulation & display unit and configured to transmit a modified device information to the substrate processing device.


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