The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2019
Filed:
Feb. 26, 2015
Applicant:
Sumco Corporation, Tokyo, JP;
Inventor:
Yoshinobu Nishimura, Tokyo, JP;
Assignee:
SUMCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 49/12 (2006.01); B24B 49/00 (2012.01); B24B 41/047 (2006.01); B24B 49/02 (2006.01); B24B 7/17 (2006.01); G01B 21/22 (2006.01); H01L 21/304 (2006.01); B24B 7/22 (2006.01); B24B 37/08 (2012.01);
U.S. Cl.
CPC ...
B24B 49/00 (2013.01); B24B 7/17 (2013.01); B24B 7/228 (2013.01); B24B 37/08 (2013.01); B24B 41/047 (2013.01); B24B 49/02 (2013.01); G01B 21/22 (2013.01); H01L 21/304 (2013.01);
Abstract
A double-head grinding machine includes: a spindle driving portion configured to rotate a spindle to which a grinding wheel is attachable; a moving portion configured to move the spindle driving portions toward and away from a wafer; and an inclination measuring portion configured to measure a change in an inclination of the spindle in association with a movement of the spindle driving portions.