The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2019

Filed:

Jan. 15, 2018
Applicant:

Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-Do, KR;

Inventors:

Joon-Gon Lee, Seoul, KR;

Ryuji Tomita, Yongin-Si, KR;

Chul-Sung Kim, Seongnam-Si, KR;

Sang-Jin Hyun, Suwon-Si, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/00 (2006.01); H01L 29/417 (2006.01); H01L 29/66 (2006.01); H01L 21/8234 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/41775 (2013.01); H01L 21/823468 (2013.01); H01L 29/6656 (2013.01); H01L 29/785 (2013.01);
Abstract

An integrated circuit device includes a substrate, a gate structure, a spacer structure, a source/drain region, and a first contact structure. The substrate includes a fin-type active region. The gate structure intersects with the fin-type active region on the substrate, and has two sides and two side walls. The spacer structure is disposed on both side walls of the gate structure and includes a first spacer layer contacting at least a portion of both side walls of the gate structure and a second spacer layer disposed on the first spacer layer and having a lower dielectric constant than a dielectric constant of the first spacer layer. The source/drain region is disposed on both sides of the gate structure. The first contact structure is electrically connected to the source/drain region and includes a first contact plug disposed on the source/drain region and a first metallic capping layer disposed on the first contact plug.


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