The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2019
Filed:
Aug. 24, 2016
Screen Holdings Co., Ltd., Kyoto, JP;
Koji Nishiyama, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
A cleaning drying processing unit includes a lower spin chuck, a splash prevention cup, and a storage member. The splash prevention cup is provided to surround the lower spin chuck, and has an annular opening that can be opposite to an outer peripheral end of a substrate rotated by the lower spin chuck. A lower portion of the splash prevention cup is stored in the storage member. Cleaning and drying processing using a cleaning liquid are performed on the substrate rotated by the lower spin chuck. At this time, the splash prevention cup is supported such that the annular opening is opposite to the outer peripheral end of the substrate. Gas in a space opposite to the annular opening is sucked from the annular opening through a first annular space of the splash prevention cup and a second annular space in the storage member.