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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10283366 B1

PDFFull Text
Date of Patent:
May. 07, 2019

Filed:

Oct. 03, 2016

Passivation of nonlinear optical crystals

Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Yung-Ho Chuang, Cupertino, CA (US);

Vladimir Dribinski, Scotts Valley, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:

Suiter Swantz pc llo

Primary Examiner:

Roy M Punnoose

Int. Cl.
CPC ...
H01L 21/30 (2006.01); C30B 29/10 (2006.01); C30B 33/00 (2006.01); C30B 33/02 (2006.01); G01N 21/3563 (2014.01); G01N 21/59 (2006.01); G01N 21/95 (2006.01); G01N 21/88 (2006.01); H01L 21/322 (2006.01); H01S 3/02 (2006.01); H01S 3/094 (2006.01); H01S 3/109 (2006.01); H01S 3/16 (2006.01); G01N 21/35 (2014.01); G01N 21/84 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3003 (2013.01); C30B 29/10 (2013.01); C30B 33/00 (2013.01); C30B 33/02 (2013.01); G01N 21/3563 (2013.01); G01N 21/59 (2013.01); G01N 21/8806 (2013.01); G01N 21/9501 (2013.01); H01L 21/322 (2013.01); H01S 3/027 (2013.01); H01S 3/094 (2013.01); H01S 3/109 (2013.01); H01S 3/1666 (2013.01); G01N 2021/3568 (2013.01); G01N 2021/3595 (2013.01); G01N 2021/8477 (2013.01); G01N 2021/8822 (2013.01); G01N 2201/06113 (2013.01);
Abstract

A laser system includes a nonlinear optical (NLO) crystal, wherein the NLO crystal is annealed within a selected temperature range. The NLO crystal is passivated with at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound to a selected passivation level. The system further includes at least one light source, wherein at least one light source is configured to generate light of a selected wavelength and at least one light source is configured to transmit light through the NLO crystal. The system further includes a crystal housing unit configured to house the NLO crystal.

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